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PHASICS

Kaleo MultiWAVE

Phasics는 투과 및 반사 파면 오류(TWE/RWE)를 모두 측정할 수 있는 새로운 기기로 광학 계측을 혁신하고 있습니다. 코팅된 광학 및 코팅되지 않은 광학 장치는 작동 파장에서 직경 5.1인치(130mm)에 걸쳐 검증할 수 있습니다. Kaleo MultiWAVE는 여러 간섭계를 구매할 때 사용할 수 있는 유리한 대안이자 비용 효율적인 솔루션입니다. 이 시스템은 Fizeau 간섭계에 필적하는 측정 정확도를 제공합니다.

    • Any wavelength on demand: UV - VISIBLE - NIR - SWIR - MWIR - LWIR
    • Multiple wavelengths on the same test bench
    • Nanometric phase resolution and large dynamics (> 500 fringes)
  •  SYSTEM
    ConfigurationDouble pass
    Measurement capabilityRWE of reflective surfaces TWE of transparent optics
    Number of wavelengths per instrument1 or 2 (standard), up to 8 (custom)
    Custom WavelengthsAny wavelength from 193 nm to 14 μm including: UV: 266, 355, 405 nm VIS / NIR: 550, 625, 780, 940, 1050 nm SWIR / MWIR / LWIR: 1.55, 2.0, 3.39, 10.6 µm
    Clear Aperture5.1" (130 mm)
    Beam height108 mm
    Alignment systemLive phase & Zernike coefficients display
    PolarizationCompatible with depolarizing optics
    Alignment FOV+/- 2°
    Pupil focus range+/- 2.5 m
    Dimensions / Weight910 x 600 x 260 mm³, 25 kg
    Vibration isolationNot necessary
    PERFORMANCE(1)
    RMS repeatability (2)< 0.7 nm (< λ / 900)
    Sample reflectivity range~4% - 100%


    (1) On a 4″ pupil size, with a 625 nm source
    (2) 36 sequential measurements are performed on a 4” reference mirror, each being averaged 16 times. A reference is defined as the average of all odd numbered measurements. RMS repeatability is then defined as the average RMS difference plus 2 times the standard deviation of the difference between even numbered measurements and the reference.


  • • Optics metrology and optical system alignment