PHASICS
Kaleo MultiWAVE
Phasics는 투과 및 반사 파면 오류(TWE/RWE)를 모두 측정할 수 있는 새로운 기기로 광학 계측을 혁신하고 있습니다. 코팅된 광학 및 코팅되지 않은 광학 장치는 작동 파장에서 직경 5.1인치(130mm)에 걸쳐 검증할 수 있습니다. Kaleo MultiWAVE는 여러 간섭계를 구매할 때 사용할 수 있는 유리한 대안이자 비용 효율적인 솔루션입니다. 이 시스템은 Fizeau 간섭계에 필적하는 측정 정확도를 제공합니다.
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- Any wavelength on demand: UV - VISIBLE - NIR - SWIR - MWIR - LWIR
- Multiple wavelengths on the same test bench
- Nanometric phase resolution and large dynamics (> 500 fringes)
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SYSTEM
PERFORMANCE(1)Configuration Double pass Measurement capability RWE of reflective surfaces TWE of transparent optics Number of wavelengths per instrument 1 or 2 (standard), up to 8 (custom) Custom Wavelengths Any wavelength from 193 nm to 14 μm including: UV: 266, 355, 405 nm VIS / NIR: 550, 625, 780, 940, 1050 nm SWIR / MWIR / LWIR: 1.55, 2.0, 3.39, 10.6 µm Clear Aperture 5.1" (130 mm) Beam height 108 mm Alignment system Live phase & Zernike coefficients display Polarization Compatible with depolarizing optics Alignment FOV +/- 2° Pupil focus range +/- 2.5 m Dimensions / Weight 910 x 600 x 260 mm³, 25 kg Vibration isolation Not necessary RMS repeatability (2) < 0.7 nm (< λ / 900) Sample reflectivity range ~4% - 100% (1) On a 4″ pupil size, with a 625 nm source
(2) 36 sequential measurements are performed on a 4” reference mirror, each being averaged 16 times. A reference is defined as the average of all odd numbered measurements. RMS repeatability is then defined as the average RMS difference plus 2 times the standard deviation of the difference between even numbered measurements and the reference.
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• Optics metrology and optical system alignment
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