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COAXIAL

RFG 15K-AC

RFG 15K-AC (15kW / 15,000 WATT) RF 발생기는 과학 및 산업 응용 분야 모두를위한 정밀 장치입니다. 최신 설계 기술과 함께 검증 된 구성 요소를 사용한 견고한 구조는 열악한 환경에서도 길고 문제없는 수명을 보장합니다. 발전기는 완전히 공랭식이므로 서비스 요구 사항을 상당히 줄이고 간단한 설치가 가능합니다.
발전기는 수동 또는 자동 임피던스 매칭 네트워크와 함께 사용하는 것이 좋습니다. 두 유형 모두 Coaxial Power Systems Ltd에서 구입할 수 있습니다. 자세한 내용은 별도의 브로셔를 참조하십시오. 자동 네트워크를 사용하는 경우 컨트롤러를 발전기 캐비닛에 장착 할 수 있습니다.

제품문의
  • Features
    • Model RFG 15K-AC-2 (15kW / 15,000 Watts / 2Mhz)
    • Model RFG 15K-AC-13 (15kW / 15,000 Watts / 13.56Mhz)
    • Model RFG 15K-AC-27 (15kW / 15,000 Watts / 27.12Mhz)
    • Model RFG 15K-AC-40 (15kW / 15,000 Watts / 40.68Mhz) 
    The main features of all models are
    • Proven design and track record.
    • Forced-air cooled.
    • Individual LED displays for incident (forward) and reflected power.
    • Precision power control +/- 1% of set point.
    • Common exciter input/output.
    • Fast pulse operation from TTL/CMOS input (Optional)
    • Solid State/Power Tube design for reliable performance.
    • The output power of the generator is fully adjustable between zero and maximum power.
    • The feedback control system ensures that the set output power remains constant and repeatable.
    • 2MHz, 13.56MHz, 27.12MHz and 40.68MHz frequencies available as standard.
    • Swivel Lock Castor Wheels.
    • Safety Interlock Switchgear on all external panels.
    • 380-415 VAC (3 phase) – Standard
    • 208 VAC (3 phase) – Optional
    • 480 VAC (3 phase) – Optional
    (Non-standard frequencies are available - please contact factory for details).
    The output power of each generator is fully adjustable between zero and maximum power. The feedback control system
    ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements
    are internally calibrated to give high accuracy throughout the power range.
  • Specifications
    Please refer to the datasheet.
  • Options / Accessories
    • An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the DC voltage developed across the plasma dark space can be controlled rather than the RF power.
  • Applications


  • Product Literature
    RFG 15K-AC DATASHEET
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